| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating apparatus for fluid controller and a fluid control apparatus including such a heating apparatus for fluid controller in which it shows a superior heating performance and a heat insulation performance and further it is sufficient to have a small space for installation.SOLUTION: A heating apparatus 10 for a fluid controller comprises a cylindrical heater unit 11 enclosing a part of an opening or closing valve 3 to be heated and a heat insulation jacket 16 enclosing the heater unit 11. The heater unit 11 has a pair of heat transfer members 12, 13 to which each of the plate-like heaters 14, 15 is fixed. Each of the heat transfer members 12, 13 is fixed to hold the opening or closing valve 3 from both sides and can be connected to each other by screw members 17. A heat insulation jacket 16 is applied as an integral cylindrical item.SELECTED DRAWING: Figure 2 |
