| 摘要 |
A piezoelectric scanning device is provided to make a platform have a constant rotation center to quickly/precisely deflect a laser beam inputted to the platform to the desired direction, reduce stress applied to a connection part of the platform, and realize precise and fast rotation even if an error caused from a manufacturing process and a driving environment change is present. The platform(56) is arranged to an upper side of a base. A pair of actuators(58) respectively support a lower part of the platform at the base. A connecting member(60) is pivotally combined to the platform with one axis and is pivotally combined to both sides of the base according to another axis perpendicular to the axis. The actuators are symmetrically arranged to the axis of the platform. The connecting member includes a pivot connector connected to the platform and rotated to one direction, and multiple elevating connectors(64). Each elevating connector includes the second and third hinge(65,67) respectively connected to the pivot and the base, and rotated to one direction perpendicular to the first hinge(63), and the lever(66) connecting the second and third hinge.
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