| 摘要 |
<P>PROBLEM TO BE SOLVED: To transfer workpieces in a prescribed state without load lock system which needs a complex mechanism and replacement gas. <P>SOLUTION: A workpiece transfer section 40 transfers a workpiece W in an air-tight state between a processing chamber 12 and a transfer box 41, which are arranged having opening sections 31 and 42 facing each other. The workpiece transfer section 40 comprises: a processing chamber lid section 33 which opens and closes the opening section 31 of the processing chamber 12 freely, shuts the chamber out in an air-tight state, and has a concave section 32a in the transfer box 41 side; a guide mechanism 34 for guiding the processing chamber lid section 33 into an inside of the processing chamber 12; a supporting table 13 provided in the processing chamber 12; a transfer box lid section 43 which opens and closes the opening section 42 of the transfer box 41 freely, shuts the box out in an air-tight state, and is engaged air-tightly in the concave section 32a; and a joint section 50 for air-tightly connecting a front section 31a which is a rim of the opening section 31 of the processing chamber 12 and a front section 42a which is a rim of the opening section 42 of the transfer box 41. <P>COPYRIGHT: (C)2012,JPO&INPIT |
