发明名称 MICROMECHANICAL OPTICAL SWITCH AND METHOD OF MANUFACTURE
摘要 <p>The present invention relates to optical MEMS components, and in particular, to methods of fabricating a micromechanical optical switch. A removable layer is used during fabrication to define the gap between optical waveguides and a moveable element in the form of a mirror that is moved between states. This provides a high speed, low-power optical switch that is readily manufacturable.</p>
申请公布号 WO2002019011(A2) 申请公布日期 2002.03.07
申请号 US2001023388 申请日期 2001.07.25
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