发明名称 LASER PATTERN MASK AND METHOD FOR FABRICATING THE SAME
摘要 The present invention relates to a laser pattern mask, and a method for fabricating the same, which can prevent a laser pattern mask from being damaged by coating a protective film on a surface of a laser pattern mask for patterning an entire layer on a mother substrate at a time by laser ablation. The laser pattern mask includes a base substrate, a laser shielding pattern formed of a non-transparent metal on the base substrate to define laser pass through regions, and a protective film formed on an entire surface of the base substrate including the laser shielding pattern.
申请公布号 US2012082828(A1) 申请公布日期 2012.04.05
申请号 US20100973448 申请日期 2010.12.20
申请人 KU SUN-JU;CHOI JUN-HO 发明人 KU SUN-JU;CHOI JUN-HO
分类号 B32B15/02;B32B3/10;C23C14/14;C23C14/34;G03F7/20 主分类号 B32B15/02
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