SIMULATION TEST SYSTEM FOR INTEGRATED CIRCUIT MANUFACTURING DEVICE

摘要

A simulation test system for integrated circuit manufacturing device includes: a plurality of tested apparatus and a simulation computer, wherein, the simulation computer includes a boardcard configuration subsystem (1000), for generating a boardcard configuration file, configuring a boardcard number for each of a plurality of boardcards based on the boardcard configuration file, and configuring a channel number for each of a plurality of channels in each boardcard of a plurality of boardcards; a static configuration subsystem (2000), for generating a static configuration file, and configuring pins, an instruction set and a status set of the tested apparatus based on the static configuration file; and a dynamical operation subsystem (3000), for connecting the pins of each of a plurality of tested apparatus with corresponding channels in a plurality of boardcards based on the static configuration file and the boardcard configuration file, so as to send instructions to a plurality of tested apparatus through a plurality of boardcards.