POWER DISTRIBUTOR FOR MANUFACTURING EQUIPMENT OF SEMICONDUCTOR AND DISPLAY DEVICE

摘要

PURPOSE: A power distributing device for semiconductor and display device manufacturing equipment is provided to block interference between power lines by connecting a branch block with a step to a magnetic switch. CONSTITUTION: A molded-case circuit breaker(301) includes a three phase input terminal and a three phase output terminal. An input terminal of a magnetic switch(302) is connected to an output terminal of the molded-case circuit breaker. First to third branch blocks(304-306) are connected to the output terminal of the magnetic switch. A step is formed on the power line connection surface.