| 发明名称 |
RESIST COMPOSITION AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE |
| 摘要 |
A resist composition includes: a crosslinking material that is crosslinked in the presence of an acid; an acid amplifier; and a solvent.
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| 申请公布号 |
US2012077343(A1) |
申请公布日期 |
2012.03.29 |
| 申请号 |
US201113238004 |
申请日期 |
2011.09.21 |
| 申请人 |
ARIMITSU KOJI;MATSUZAWA NOBUYUKI;MITA ISAO;SONY CORPORATION |
发明人 |
ARIMITSU KOJI;MATSUZAWA NOBUYUKI;MITA ISAO |
| 分类号 |
H01L21/311;G03F7/004 |
主分类号 |
H01L21/311 |
| 代理机构 |
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代理人 |
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| 主权项 |
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