发明名称 THIN FILM BUFFER LAYER SOLUTION DEPOSITION ASSEMBLY
摘要 Methods and devices are provided for improved deposition systems. In one non-limiting example, a deposition system is provided for use with a solution and a substrate. The system comprises of a solution deposition apparatus; at least one heating chamber; at least one assembly for holding a solution over the substrate; and a substrate curling apparatus for curling at least one edge of the substrate to define a zone capable of containing a volume of the solution over the substrate. In another embodiment of the present invention, a deposition system for use with a substrate, the system comprising a solution deposition apparatus; at heating chamber; and at least assembly for holding solution over the substrate to allow for a depth of at least about 0.5 microns to 10 mm.
申请公布号 WO2011143275(A3) 申请公布日期 2012.03.29
申请号 WO2011US35996 申请日期 2011.05.10
申请人 NANOSOLAR, INC.;GREGORATTO, IVANO;SCHOLZ, JEREMY, H.;UTTHACHOO, PIYAPHANT 发明人 GREGORATTO, IVANO;SCHOLZ, JEREMY, H.;UTTHACHOO, PIYAPHANT
分类号 H01L31/18;H01L31/042 主分类号 H01L31/18
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