X-RAY ANALYSIS METHOD, X-RAY ANALYSIS DEVICE, AND PROGRAM THEREFOR

摘要

[Problem] To provide a fluorescent X-ray analysis method capable of accurately calculating the intensity and calculating the accurate quantitative value even when there is no database for storing an enormous number of tables. [Solution] Attention is paid to the accuracy of a quantitative value obtained using an FP method or a calibration curve method, processing for assuming the approximate composition ratio or the like of a sample from the actual measurement value of fluorescent X-rays using a minimum required number of tables, performing a quantitative calculation using a temporary intensity obtained from the assumption, correcting the temporary intensity on the basis of a temporary quantitative value obtained by the quantitative calculation, and performing a quantitative calculation is repeated to converge the temporary intensity into a prescribed value, and the temporary quantitative value when the convergence is achieved is determined to be "a quantitative value".