DRY VACUUM PUMP

摘要

Between an exhaust chamber (13) and a lubrication chamber (12), a second seal (28) that seals between a cylinder (7) that partitions the exhaust chamber(13) and a first shaft (5) and a first seal (27) that seals between a side cover (9) that partitions the lubrication chamber (12) and the first shaft (5) are provided. A gas introduction space (29) to which a seal gas is supplied is provided between the second seal (28) and the first seal (27). The second seal (28) and the first seal (27) each have a base part and a pair of ring-like lips (31, 32, 33, and 34) extending from the base part toward the first shaft (5). The pair of lips (31 and 32 or 33 and 34) extends such that the distance therebetween is gradually increased from the base part toward the first shaft (5), and the tips of the pair of lips can be brought into elastic contact with the first shaft (5).