WAFER STORING DEVICE, AND WAFER CASSETTE STORAGE CASE

摘要

Provided is a wafer storing device capable of ejecting a stored wafer, and reducing particle emissions from the wafer. A wafer storing device (1) includes a wafer cassette (100) comprising a storage portion (110) in which a wafer (W) is stored, and a storage case (200) in which the wafer cassette (100) is stored. The storage case (200) comprises a supporting portion (214) that supports the wafer cassette (100) such that the storage portion (110) of the wafer cassette (100) is tilted at an angle (?a) of 37° to 45° with respect to the bottom of the storage case (200).