发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 According to embodiments, there is provided a semiconductor device, including: a logic circuit; an interlayer insulating film formed above the logic circuit; an amorphous silicon layer including: a non-silicide layer formed on the interlayer insulating film; and a silicide layer formed on the non-silicide layer; a TFT formed on the amorphous silicon layer; and a contact plug formed to plug a through hole penetrating the interlayer insulating film, the contact plug being electrically connected to the logic circuit, an upper part of the contact plug being connected to the silicide layer.
申请公布号 US2012068179(A1) 申请公布日期 2012.03.22
申请号 US201113051524 申请日期 2011.03.18
申请人 ISHIDA TATSUYA;INOHARA MASAHIRO;KABUSHIKI KAISHA TOSHIBA 发明人 ISHIDA TATSUYA;INOHARA MASAHIRO
分类号 H01L29/786;H01L21/768 主分类号 H01L29/786
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