| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide protective film which, even when coating film is formed with a material containing highly plasma resistant yttria, can restrain the coating film from being degraded by shedding of or cracks in yttria particles. <P>SOLUTION: According to one embodiment of the present invention, a gas supply member 41 comprises a gas supply passage 42 comprised of a gas passage 421 having a first diameter and a discharge opening 422, connected to one end of the gas passage 421, which is disposed on a surface 41A on the gas flow downstream side of the gas supply member 41. At least part of the surface which constitutes the discharge opening 422 is composed of a curved plane. Also, the surface constituting the discharge opening 422 and the surface 41A on the downstream side of the gas supply member 41 include an yttria containing film 50 therein. <P>COPYRIGHT: (C)2012,JPO&INPIT |
