| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture an optical scale having defect-free reflection films. <P>SOLUTION: In a method of manufacturing an optical scale 1 including at least a base material 3, a diffraction grating film 5 formed on the base material 3 and having a diffraction grating 4, and reflection films 6 formed on the diffraction grating film 5, a first reflection film 6a is formed by a sputtering method on the diffraction grating film 5 formed on the base material 3, and after defect removing means 11 removes a defect part 10 of the first reflection film 6a from the first reflection film 6a, a second reflection film 6b is formed by the sputtering method on the first reflection film 6a. <P>COPYRIGHT: (C)2012,JPO&INPIT |
