| 摘要 |
<p>PURPOSE: A solar battery board and a manufacturing method thereof are provided to form an uneven layer on a transparent conductive film by excimer laser annealing, thereby increasing the efficiency of a solar battery by making multiple scattering in the solar battery. CONSTITUTION: A transparent conductive film(12) is formed on a transparent board(11). An uneven layer(13) is formed on the transparent conductive film by laser annealing. Laser irradiated onto the surface of the transparent conductive film is YAG laser or excimer laser. The optical wavelength of the laser is 300nm~400nm. The transparent conductive film comprises a thin zinc oxide film in which a dopant is doped.</p> |
