SUBSTRATE SUPPORTING UNIT, SUBSTRATE INSPECTING APPARATUS INCLUDING THE UNIT, AND SUBSTRATE INSPECTING METHOD USING THE APPARATUS,申请号KR20090111052-传众专利搜索

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发明名称	SUBSTRATE SUPPORTING UNIT, SUBSTRATE INSPECTING APPARATUS INCLUDING THE UNIT, AND SUBSTRATE INSPECTING METHOD USING THE APPARATUS
摘要
申请公布号	KR101109078(B1)	申请公布日期	2012.03.13
申请号	KR20090111052	申请日期	2009.11.17
申请人		发明人
分类号	H01L21/683;H01L21/66	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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