AIR GAP ISOLATION BETWEEN THE BIT LINES OF A NON-VOLATILE MEMORY AND METHODS OF MANUFACTURING THE SAME

摘要

Air gap isolation in non-volatile memory arrays and related fabrication processes are provided. Electrical isolation can be provided, at least in part, by bit line air gaps that are elongated in a column direction and/or word line air gaps that are elongated in a row direction. The bit line air gaps (306) may be formed in the substrate, extending between adjacent active areas of the substrate, as well as above the substrate surface, extending between adjacent columns of non-volatile storage elements. The word line air gaps may be formed above the substrate surface, extending between adjacent rows of non-volatile storage elements.