| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve electronic properties in a wiring structure. <P>SOLUTION: The method of manufacturing a carbon nanotube wiring includes steps of: forming an insulating film 18 on a first conductive layer 200; forming a hole 40, which penetrates the insulating film, in the insulating film; forming a catalyst base film 19 on the first conductive layer on the bottom in the hole and on the insulating film of the side face in the hole; forming a catalyst inactive film 20 on the catalyst base film of the side face in the hole; forming a catalyst film 21 on the catalyst base film on the bottom in the hole and on the catalyst inactive film of the side face in the hole; and growing a plurality of carbon nanotubes 22 from the upper part of the catalyst film on the bottom in the hole. <P>COPYRIGHT: (C)2012,JPO&INPIT |
