发明名称 METHOD OF MANUFACTURING LIQUID EJECTION HEAD
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid ejection head in which the shape of bubble generating chambers is not varied depending upon an exposure amount, and a flow path forming member can be cured with a sufficient exposure amount so that the durability of the flow path forming member is high. <P>SOLUTION: Provided is a method of manufacturing a liquid ejection head, the liquid ejection head including: a substrate having an energy generating element that generates energy for ejecting liquid; and a flow path forming member having, on an upper side of the energy generating element, an ejection orifice for ejecting the liquid and a bubble generating chamber communicated with the ejection orifice, the method including: preparing a negative photosensitive resin as a material constituting the flow path forming member; and performing first exposure treatment for forming a first image constituting a side wall of the bubble generating chamber and second exposure treatment for forming a second image constituting a side wall of the ejection orifice so that a side wall of the first image and a side wall of the second image cross each other diagonally. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012045769(A) 申请公布日期 2012.03.08
申请号 JP20100188425 申请日期 2010.08.25
申请人 CANON INC 发明人 HORIUCHI ISAMU
分类号 B41J2/16;B41J2/05 主分类号 B41J2/16
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