发明名称 PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS
摘要 A piezoelectric element according to an embodiment of the invention includes a first electrode containing a noble metal, a first multilayer composite disposed on the first electrode, a second multilayer composite disposed on the first electrode with a distance from the first multilayer composite, an oxide film partly disposed on the surface of the first electrode between the first multilayer composite and the second multilayer composite, and a covering layer. The covering layer covers the side surfaces of the first and second multilayer composites, and the oxide film and the surface of the first electrode between the first multilayer composite and the second multilayer composite. The first multilayer composite and the second multilayer composite each include a piezoelectric layer, and a second electrode over the piezoelectric layer.
申请公布号 US2012056945(A1) 申请公布日期 2012.03.08
申请号 US201113225107 申请日期 2011.09.02
申请人 NAKAYAMA MASAO;SEIKO EPSON CORPORATION 发明人 NAKAYAMA MASAO
分类号 H01L41/047;B41J2/045 主分类号 H01L41/047
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