发明名称 METHOD FOR PROVIDING ELECTRICAL CONNECTIONS TO SPACED CONDUCTIVE LINES
摘要 <p>An integrated circuit and a method of formation provide a contact area formed at an angled end of at least one linearly extending conductive line. In an embodiment, conductive lines with contact landing pads are formed by patterning lines in a mask material, cutting at least one of the material lines to form an angle relative to the extending direction of the material lines, forming extensions from the angled end faces of the mask material, and patterning an underlying conductor by etching using said material lines and extension as a mask. In another embodiment, at least one conductive line is cut at an angle relative to the extending direction of the conductive line to produce an angled end face, and an electrical contact landing pad is formed in contact with the angled end face.</p>
申请公布号 EP2425449(A2) 申请公布日期 2012.03.07
申请号 EP20100724936 申请日期 2010.05.14
申请人 MICRON TECHNOLOGY, INC. 发明人 SANDHU, GURTEJ;SILLS, SCOTT
分类号 H01L21/768;H01L21/8242;H01L23/528 主分类号 H01L21/768
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