| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent voids caused by gas remaining inside a substrate from being formed in an injected adhesive. <P>SOLUTION: A sealing material 101 having an adhesive injection port 101a and an exhaust port 101b is formed on a circumferential side face of a substrate W. The adhesive injection port 101a of the sealing material 101 is immersed in an adhesive 102, and the exhaust port 101b is covered with an exhaust nozzle 110. A nozzle joint 121 to which a pump-side joint 122 connected to a vacuum pump P1 is fitted is connected to the exhaust nozzle 110. By the vacuum pump P1, gas remaining in gaps inside the substrate W is sucked through the exhaust port 101b to inject the adhesive 102 into the gaps. <P>COPYRIGHT: (C)2012,JPO&INPIT |
