发明名称 CONTINUOUS FURNACE
摘要 <p>Continuous furnace for the thermal conversion of a metallic precursor layer arranged on a substrate (3) in a gas flow, in particular for the conversion of a precursor layer into a CIGSS layer, with a continuous tunnel, comprising a plurality of successive segments (5, 6, 7, 8, 9), wherein the cross-section of the tunnel in a middle segment (6, 7) is smaller than in a segment (5, 8, 9) adjacent the middle segment.</p>
申请公布号 WO2012025819(A1) 申请公布日期 2012.03.01
申请号 WO2011IB01949 申请日期 2011.08.25
申请人 CENTROTHERM PHOTOVOLTAICS AG;FLUECKIGER, ANDREAS;KOETSCHAU, IMMO;REICHART, ANDREAS 发明人 FLUECKIGER, ANDREAS;KOETSCHAU, IMMO;REICHART, ANDREAS
分类号 C23C14/06;C23C14/58;F27B9/30;H01L31/18 主分类号 C23C14/06
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