发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 In one embodiment, a separation layer and a wiring layer are formed in order on a supporting substrate. A plurality of semiconductor chips are mounted on the wiring layer. The plural semiconductor chips are collectively sealed by a sealing resin layer. A resin-sealed body is evenly held by a holder. The resin-sealed body is separated from the supporting substrate by shearing the separation layer while being heated. The separated resin-sealed body is cooled while a state of the resin-sealed body being held evenly by the holder is maintained, and then a holding state of the resin-sealed body by the holder is released. The resin-sealed body is cut to singulate a circuit structure body.
申请公布号 US2012052632(A1) 申请公布日期 2012.03.01
申请号 US201113215427 申请日期 2011.08.23
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SATO TAKAO;MIURA MASAYUKI;KAMOTO TAKU
分类号 H01L21/50 主分类号 H01L21/50
代理机构 代理人
主权项
地址