MANUFACTURING METHOD OF OPTICAL WAVEGUIDE COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide a groove inclined with respect to a substrate surface and having less inclination angle change on a PLC (planar optical circuit).

SOLUTION: A PLC is held inclined with respect to a substrate surface using an inclination-holding tool 20 on a bottom electrode in an etching chamber. An electrolytic control block 30 is provided in the vicinity of the PLC for controlling electric field distribution in the chamber. A groove is then formed on the PLC by anisotropic plasma etching in a state where the inclination-holing tool and the electrolytic control block are electrically connected with the bottom electrode.

COPYRIGHT: (C)2012,JPO&INPIT