| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shield member capable of preventing abnormal discharge and erosion from being generated in a lower electrode, with no gap generated between the shield member and the lower electrode even when the shield member is thermally expanded. <P>SOLUTION: A ring component part is formed by an insulating long article disposed along one leg of a rectangular mounting face of the lower electrode, and has a fixing screw hole provided at one end in the lengthwise direction thereof and a supporting screw hole provided apart from the other in the lengthwise direction of the long article. Each of the ring component parts is combined with another so that an end face at one end of the each component part in the lengthwise direction abuts on a side face at one end of the adjacent component part in the lengthwise direction, and that the side face on the other end of the each component part abuts on the end face at one end of the ring component part different from the adjacent ring component part. One end of each of the ring component parts in the lengthwise direction is fixed to a base material of a mounting stand by the fixing screw hole, while the other end is supported in a freely displaceable manner by the supporting screw hole. Each of the component parts is arranged so as to be able to thermally expand or thermally shrink in the lengthwise direction of the long article with the fixed end as an origin, each corner portion of the lower electrode is beveled by a plane, and a triangular fitting member having a plane abutting on the beveled plane is disposed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
