发明名称 |
Crosslinked fluorinated poly(arylene ether) |
摘要 |
Fluorinated poly(arylene ethers) having a repeat unit such as <IMAGE> are useful as dielectric materials in multilayer interconnects in integrated circuit chips and multichip modules and as protective materials for chips.
|
申请公布号 |
US5204416(A) |
申请公布日期 |
1993.04.20 |
申请号 |
US19920864804 |
申请日期 |
1992.04.07 |
申请人 |
RAYCHEM CORPORATION |
发明人 |
MERCER, FRANK W.;SOVISH, RICHARD C. |
分类号 |
C08G65/40;C08G75/23;C08L71/00;C08L81/06;H01L23/29;H01L23/498;H01L23/532;H05K1/00;H05K1/03 |
主分类号 |
C08G65/40 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|