发明名称 |
Method of manufacturing a semiconductor device having an electrode exposed through a hole |
摘要 |
A method of manufacturing a semiconductor device may include, but is not limited to the following processes. A first insulating film is formed over a substrate. A second insulating film is formed on the first insulating film. An electrode penetrating the first and the second insulating films is formed. A part of the second insulating film and a part of the electrode are removed so that a first hole is formed in the second insulating film. A first portion of the electrode is exposed through the first hole. A part of the first portion of the electrode is removed by an isotropic etching. |
申请公布号 |
US8124493(B2) |
申请公布日期 |
2012.02.28 |
申请号 |
US20100846305 |
申请日期 |
2010.07.29 |
申请人 |
KOMEDA KENJI;ELPIDA MEMORY, INC. |
发明人 |
KOMEDA KENJI |
分类号 |
H01L21/20;H01L21/311 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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