| 摘要 |
PURPOSE: A route generating method of a synchronized stage and scanner is provided to improve the quality of a work piece by applying various stage paths according to processing drawing and processing condition. CONSTITUTION: A route generating method of a synchronized stage and scanner comprises the steps of: setting acceleration and deceleration time(Ta) of a stage passing through an inflection point of a processing path, extracting a stage path from the processing path, calculating a stage speed from the processing path, obtaining a scanner speed by subtracting the stage speed from a processing speed, extracting a scanner path by integrating the scanner speed by unit time, and determining the processing path is included in a work region during the movement of the stage and, if not, correcting the stage path through NURBS(Non-Uniform Rational Basis Spline) interpolation. |
