| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform an inspection without damaging a sample at a sampling rate higher than the pulse oscillation frequency of a pulse laser emitted from a pulse laser beam source. <P>SOLUTION: In a defect detection method for dividing light for one pulse of pulse light emitted from a pulse light source into a plurality of pulses, irradiating the sample with the divided pulse light, condensing and detecting scattered light generated from the sample by irradiation, and detecting a defect on the sample using information obtained by condensing and detecting the scattered light from the sample, the division of the light for one pulse into a plurality of pulse light beams is controlled so as to roughly fix the peak values of the respective divided pulse light beams, and the division is performed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
