| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma jet apparatus that processes a material of large lateral width in a short time at low cost. <P>SOLUTION: The atmospheric pressure plasma jet apparatus includes atmospheric pressure plasma jet generation means 3 for generating an atmospheric pressure plasma jet using a material gas consisting of a single gaseous species or two or more gaseous species which are unlikely to chemically react with each other in plasma, and a nozzle 5 which jets plasma plumes of the atmospheric pressure plasma jet, the nozzle 5 including an exit-side opening 25 which is sectioned in a thin and long slit shape, and also internally having a diffusion member 29 which spreads the plasma plumes in a length direction of the slit shape. <P>COPYRIGHT: (C)2012,JPO&INPIT |
