| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas seal device capable of reducing wear caused by contact rotation between a rotary ring and a stationary ring and easily enlarging the diameter of a dry gas seal while retaining a sealing property. <P>SOLUTION: The gas seal device has the rotary ring 5 attached to a rotary shaft 2 and the stationary ring 6 which faces the rotary ring 5 and is supported by a housing 1, a dynamic pressure generation groove 7 being formed on one side of opposite surfaces 5a, 6a of the rotary ring 5 and the stationary ring 6, and the stationary ring 6 pressed against the rotary ring 5 by a spring 8 where a resin film 14 for by coating a polybenzimidazol type resin is formed on the opposite surface 6a of the rotary ring 5 to the stationary ring 6. <P>COPYRIGHT: (C)2012,JPO&INPIT |
