发明名称 Methods Of Forming Non-Volatile Memory Devices Including Dummy Word Lines
摘要 A non-volatile memory device may include a semiconductor substrate including an active region at a surface thereof, a first memory cell string on the active region, and a second memory cell string on the active region. The first memory cell string may include a first plurality of word lines crossing the active region between a first ground select line and a first string select line, and about a same first spacing may be provided between adjacent ones of the first plurality of word lines. The second memory cell string may include a second plurality of word lines crossing the active region between a second ground select line and a second string select line, and about the same first spacing may be provided between adjacent ones of the second plurality of word lines. Related methods are also discussed.
申请公布号 US2012045890(A1) 申请公布日期 2012.02.23
申请号 US201113236913 申请日期 2011.09.20
申请人 SEL JONG-SUN;CHOI JUNG-DAL;PARK YOUNG-WOO;PARK JIN-TAEK 发明人 SEL JONG-SUN;CHOI JUNG-DAL;PARK YOUNG-WOO;PARK JIN-TAEK
分类号 H01L21/28 主分类号 H01L21/28
代理机构 代理人
主权项
地址
您可能感兴趣的专利