发明名称 |
GAS DISTRIBUTOR PLATE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: A gas distributor plate and a manufacture method thereof are provided to prevent the generation of a crack in a production process by welding and coupling outer circumferences of an upper and bottom portion of a gas discharge pin with laser. CONSTITUTION: A pin inserting hole(57) of a base plate(50) is formed to be penetrated on a bottom surface of a space part. A through hole(17) is formed to be opposite to the pin inserting hole at a cover plate(10). The cover plate is combined with a top portion of the base plate. An upper and bottom portion of a gas discharge pin(20) are inserted into the through hole and the pin inserting hole. The gas discharge pin is welded and coupled along outer circumferences of the bottom and upper portion with laser.
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申请公布号 |
KR20120015532(A) |
申请公布日期 |
2012.02.22 |
申请号 |
KR20100077695 |
申请日期 |
2010.08.12 |
申请人 |
DONGWON PRECISION MACHINERY CO., LTD. |
发明人 |
KO, BU JIN |
分类号 |
H01L21/205;C23C16/455 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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