Substrate processing apparatus,申请号KR20090036650-传众专利搜索

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发明名称	Substrate processing apparatus
摘要
申请公布号	KR101115868(B1)	申请公布日期	2012.02.21
申请号	KR20090036650	申请日期	2009.04.27
申请人		发明人
分类号	H01L21/687;H01L21/205;H01L21/3065	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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