APPARATUS AND METHOD FOR REVIEW TESTING THIN FILM TRANSISTOR SUBSTRATE

摘要

PURPOSE: A review inspection apparatus and method for a thin film transistor substrate are provided to detect faults on the upper and lower surface of a thin film transistor substrate at the same time using an upper optical system located above the substrate. CONSTITUTION: A review inspection apparatus for a thin film transistor substrate comprises a stage(140), an upper optical system(110), and a lower optical system(130). In the stage, a thin film transistor substrate(150) is settled. The upper optical system is located above the thin film transistor substrate. The lower optical system is located underneath the thin film transistor substrate. Light coming out from one of the optical systems is reflected off the thin film transistor inside substrate for review inspection of either the upper surface or lower surface of the thin film transistor substrate and then passes through the thin film transistor substrate for review inspection of the other.