发明名称 |
PROBES FORMED FROM SEMICONDUCTOR REGION VIAS |
摘要 |
Embodiments of the invention describe forming a set of probes using semiconductor regions each including a plurality of vias. A first set of probe segments may be formed from a first set of vias on a first semiconductor region. A second set of probe segments may be formed from a second set of vias on a second semiconductor region and bonded to the first set of probe segments. At least one spring comprising a dielectric material may be formed to couple the first set of probe segments, while a set of metal tips disposed on the second set of probe segments. |
申请公布号 |
US2012038379(A1) |
申请公布日期 |
2012.02.16 |
申请号 |
US20100854697 |
申请日期 |
2010.08.11 |
申请人 |
MA QING;SWART ROY E.;FISCHER PAUL B.;SWAN JOHANNA M. |
发明人 |
MA QING;SWART ROY E.;FISCHER PAUL B.;SWAN JOHANNA M. |
分类号 |
G01R31/20 |
主分类号 |
G01R31/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|