Mask carrier, mask handling module and method for adjusting a mask

摘要

The present invention relates to the field of mask carriers and mask alignment in vacuum deposition processes. In particular, it relates to mask carriers, respective mask handling modules and methods for aligning a mask. A mask handling module (1) may comprise: a substrate carrier (2) for carrying at least one substrate; a mask carrier (3) for carrying at least two masks, wherein the mask carrier (3) comprises at least two mask carrier sections (31,32) each being adapted to carry a mask; a mask carrier positioning device (39) for moving the mask carrier (3) relative to the substrate carrier (2); wherein the mask carrier sections (31,32) are arranged so that the masks carried on the mask carrier sections (31,32) can be positioned on the mask carrier (3) in respective planes forming an angle (±) with respect to each other so that only one of the at least two masks can be aligned to one of the at least one substrate.