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发明名称
Ionisuihkuetsausmenetelmä ja ionisuihkuetsauslaite
摘要
申请公布号
FI20060719(A)
申请公布日期
2008.02.10
申请号
FI20060000719
申请日期
2006.08.09
申请人
JYVAESKYLAEN YLIOPISTO,
发明人
TOUBOLTSEV,VLADIMIR;KAARRE,MARKO;ARUTYUNOV,KONSTANTIN
分类号
H01L21/263;H01L21/64;H01L29/06;H01L49/00
主分类号
H01L21/263
代理机构
代理人
主权项
地址
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