NONCONTACT CONVEYING APPARATUS

摘要

PURPOSE: A non-contact conveying device is provided to precisely and stably convey substrates by reducing the shaking of the substrates. CONSTITUTION: A noncontact conveying device comprises a conveying plate and porous air guide units(150). The conveying plate comprises an upper plate(110) and a lower plate. Multiple air holes(111) for emitting air are formed in the upper plate. The conveying plate conveys substrates using high-pressure compressed air emitted from the air holes. Each air hole has first and second air holes(111a,111b). The second air hole is formed from the end of the first air hole to the top end of the upper plate. The porous air guide units are coupled to the first air holes and emit air to the second air holes.