Micromechanical component capping method, involves forming perforation in cap layer, where cap layer produces reduced ambient atmosphere to flow around cap layer so as to close perforation

摘要

The method involves providing a micromechanical component (101) with a sacrificial layer (105), and forming a cap layer (113) on the micromechanical component. A perforation (115) is formed in the cap layer, and the micromechanical component is patterned through the perforation, where the cap layer produces reduced ambient atmosphere to flow around the cap layer so as to close the perforation. A reinforcement layer is formed on the cap layer after closure of the perforation. An independent claim is also included for a micromechanical component comprising a substrate.