| 摘要 |
PROBLEM TO BE SOLVED: To maintain lubrication between respective members which slide according to operation and to improve durability by preventing damage etc., caused by a lubricant while taking into account heat generation resulting from influences of a high-frequency power circuit to which vacuum insulation equipment is applied and large power. SOLUTION: Slide surfaces of a movable conductor support member 12 and a bearing part 13 are coated with perfluoropolyether. Perfluoropolyether has thermal resistance, is thermally and chemically stable, and not decomposed to vaporize even at high temperature as heat generated by the vacuum insulation equipment is conducted to the slide surfaces, thereby preventing corrosion by chemical reaction on other members. COPYRIGHT: (C)2009,JPO&INPIT
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