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发明名称
A Preparation Method of Zinc Oxide Based Oxide Thin Film and Transparent Electroconductive Film
摘要
申请公布号
KR101108126(B1)
申请公布日期
2012.02.08
申请号
KR20090025696
申请日期
2009.03.26
申请人
发明人
分类号
H01B1/02;C23C14/35;C23C16/40;H01L21/203
主分类号
H01B1/02
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代理人
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