发明名称 BIAXIALLY-TEXTURED FILM DEPOSITION FOR SUPERCONDUCTOR COATED TAPES
摘要 Methods for depositing, at a very high deposition rate, a biaxially-textured film on a continuously moving metal tape substrate are disclosed. These methods comprise: depositing a film on the substrate with a deposition flux having an oblique incident angle of about 5~ to about 80~ from the substrate normal, while simultaneously bombarding the deposited film using an ion beam at an ion beam incident angle arranged along either a best ion texture direction of the film or along a second best ion texture direction of the film, thereby forming the biaxially-textured film wherein a deposition flux incident plane is arranged parallel to a direction along which the biaxially-textured film has a fast in-plane growth rate. Superconducting articles comprising a substrate, a biaxially-textured film deposited on said substrate by said methods above; and superconducting layer disposed on the biaxially-textured film are also disclosed.
申请公布号 CA2560771(C) 申请公布日期 2012.02.07
申请号 CA20052560771 申请日期 2005.04.08
申请人 SUPERPOWER, INC. 发明人 XIONG, XUMING;SELVAMANICKAM, VENKAT
分类号 H01L39/00;C23C14/08;C23C14/22;C23C14/30;C23C14/48;H01L39/24 主分类号 H01L39/00
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