| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress occurrence of abnormality in an unit block and deterioration of the throughput of an application/development device when performing maintenance, and to suppress the installation area of a processing block. <P>SOLUTION: The application/development device comprises: delivery parts for application processing to be provided between stacked unit blocks for pre-stage processing and respective stacked unit blocks for post-stage processing and to deliver substrates between transport mechanisms of both unit blocks; an auxiliary transfer mechanism provided so as to elevate and lower freely in order to convey the substrates between the delivery parts for application processing of each stage; unit blocks for development stacked on the unit blocks for the pre-stage processing and the unit blocks for post-stage processing respectively. Substrate delivery between respective layers can avoid unusable unit blocks to convey substrates. In addition, the unit blocks for development stacked on the unit blocks for the pre-stage processing and the unit blocks for post-stage processing can suppress an installation area thereof. <P>COPYRIGHT: (C)2012,JPO&INPIT |
