| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology for reliably removing halogenated silane polymers adhered to the inner wall surface of a reactor, and enabling a desired area of the reactor inner wall to be washed in a focused manner. <P>SOLUTION: A rotating member 22 which is mounted to the leading end of a vertical shaft 21, can rotate centered on an axis Q. A nozzle support 23 is able to rotate centered on an axis P, and when the rotating member 22 rotates, the rotating member 22 revolves around the vertical shaft 21 centered on an axis Q. When cleaning water is sprayed from a nozzle 24 at high pressure, the nozzle support 23 rotates centered on the axis P due to the spray reaction force, and the rotation is transmitted to the rotating member 22. Consequently, the rotating member 22 rotates at the same time the nozzle support 23 rotates. As a result, the nozzle support 23 revolves while rotating around the vertical shaft 21. Due to this self-revolving mechanism, cleaning water that is sprayed from the nozzle 24 at high pressure is sprayed three-dimensionally, thereby cleaning the surface of the inner wall 32 of the reactor 30. <P>COPYRIGHT: (C)2012,JPO&INPIT |
