| 摘要 |
<p>Described herein is an integrated microelectromechanical structure (30), provided with: a driving mass (3), anchored to a substrate (2) via elastic anchorage elements (8a, 8b) and moved in a plane (xy) with a driving movement; and a first sensing mass (16a'), suspended inside, and coupled to, the driving mass via elastic supporting elements (20') so as to be fixed with respect to the driving mass (3) in the driving movement and to perform a detection movement of rotation out of the plane (xy) in response to a first angular velocity (© x ); the elastic anchorage elements (8a, 8b) and the elastic supporting elements (20') cause the detection movement to be decoupled from the driving movement. The elastic supporting elements are coupled to the first sensing mass (16a') at an end portion (31; 31') thereof, and the axis of rotation of the detection movement extends, within the first sensing mass, only through the aforesaid end portion.</p> |
