| 摘要 |
The present disclosure is directed to improved silica-titania glass articles intended for use in EUV or other high energy reflective optic systems, and to a process for producing such improved silica-titania articles. The improved silica-titania glass articles provide a more stable surface (20) for the coatings (12) that are used in the making of reflective optical elements for EUV applications. The stable surface (20) is provided by densification of at least one face of the silica-titania article, the densification being accomplished by the use accelerated ions, neutrons, electrons and photons (³-ray, X-ray or DUV lasers). After densification, the densified face (20) of the silica-titania article can be coated with a multilayer reflective coating (12). The preferred reflective coating is a multilayer Mo/Si coating |
