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发明名称
Bi-directional filtered arc plasma source
摘要
申请公布号
EP1852891(B1)
申请公布日期
2012.02.01
申请号
EP20070005608
申请日期
2007.03.19
申请人
VAPOR TECHNOLOGIES, INC.
发明人
WELTY, RICHARD P.
分类号
H01J37/34
主分类号
H01J37/34
代理机构
代理人
主权项
地址
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